Gas Flow Controller
Mass Flow Controller(MFC) is used to accurately measure and control the mass flow of gas. They play an important role in scientific research.
Typical applications include: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments.
- Flow range: （0~5，10,20,30,50,100,200,300,500…）SCCM（0~1,2,3,5,10,50,100,200,500…） SLM - Accuracy: ±1%F.S ±0.5%F.S - Linearity: ±0.5~1.5%F.S - Repeteability: ±0.2%F.S - Responding time: 1~4 seconds - Differential pressure range: 0.1~0.5MPa - Max pressure: 3MPa - Working temperature: 0~70℃ - Digital value: RS485 MODBUS - Analog value: DC 0~5V ，4~20mA - Power supply: DC +15V/24V，flow meter＜400mA，flow controller＜600mA - Electrical connection: DB15 - Leakage rate: 1×10-8SCCSHe - Material base: 316L Stainless steel - Seal material: FKM，nitrile butadiene rubber，chloroprene rubber - Glad hand: Φ3，Φ6，Φ10，1/8〞,1/4〞，3/8〞