Especificaciones Caudalimetro
Especificaciones Caudalimetro
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Gas Flow Controller

Mass Flow Controller(MFC) is used to accurately measure and control the mass flow of gas. They play an important role in scientific research.

Typical applications include: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments.

- Flow range: (0~5,10,20,30,50,100,200,300,500…)SCCM(0~1,2,3,5,10,50,100,200,500…) SLM
- Accuracy: ±1%F.S ±0.5%F.S
- Linearity: ±0.5~1.5%F.S
- Repeteability: ±0.2%F.S
- Responding time:  1~4 seconds
- Differential pressure range:  0.1~0.5MPa
- Max pressure: 3MPa
- Working temperature: 0~70℃
- Digital value: RS485 MODBUS
- Analog value: DC 0~5V ,4~20mA
- Power supply: DC +15V/24V,flow meter<400mA,flow controller<600mA
- Electrical connection: DB15
- Leakage rate: 1×10-8SCCSHe
- Material base: 316L Stainless steel
- Seal material: FKM,nitrile butadiene rubber,chloroprene rubber
- Glad hand: Φ3,Φ6,Φ10,1/8〞,1/4〞,3/8〞
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